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Integrated Z-Stages Series 5104
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intermateable with Goniometers
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F(max)[N]
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r[mm]
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5104.A
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408, 409, 410, 411
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50
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20/40
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5104.B
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409, 410, 411
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50/100/150
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25
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5104.C
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420, 430, 440
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500
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26*
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5104.D
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480
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1500
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250*
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*Standardversions, optional:
extended or shortened travel range
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