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Series Tripod - 3-degrees of freedom

To increase the number of axes a combination with conventional positioning systems is possible as well. 
Highest resolution and guiding accuracy as well as extreme stiffness and stability characterize these systems.

For detailed information, please contact Huber directly or one of our representatives. 

3-Axes System: Rx/Ry/Z

Combination consisting of:

- Tripod (Z-Stage 5103.A10 (3x)) 
 

Accessories:

- Incremental encoder
- Absolute encoder
- Controller

5-Axes System: Rx/Ry/Z/X/Y

UHV-Combination consisting of:

- Tripod (Z-Stage 5103.A10 (3x)) 
- XY-Stage 5102.30
 

Accessories:

- Incremental encoder
- Absolute encoder
- Controller

5-Axes System: Rx/Ry/Z/Rz/X

Combination consisting of:

- Tripod (Z-Stage 5103.A20-90 (3x)) 
- Goniometer 411
- Linearstage 5101.30

Accessories:

- Incremental encoder
- Absolute encoder
- Controller

4-Axes System: X/Rx/Ry/Z

Combination consisting of:

- Linearstage 5101.45 
- Tripod (Z-Stage 5103.A10 (3x))
 

Accessories:

- Incremental encoder
- Absolute encoder
- Controller